发明名称 |
Method of fabricating an aperture plate for a roof-shooter type printhead |
摘要 |
A method of fabricating an aperture plate for a roofshooter thermal ink jet printhead wherein a two step orientation dependent etch is conducted on a silicon wafer. The two step etch forms a trough in one face of the silicon wafer and a plurality of apertures in either the same or opposite face as the trough.
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申请公布号 |
US5160577(A) |
申请公布日期 |
1992.11.03 |
申请号 |
US19910738015 |
申请日期 |
1991.07.30 |
申请人 |
DESHPANDE, NARAYAN V. |
发明人 |
DESHPANDE, NARAYAN V. |
分类号 |
B41J2/135;B41J2/16;H01L21/306 |
主分类号 |
B41J2/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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