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发明名称
SILICON VIBRATION TYPE SENSOR
摘要
申请公布号
JPH04299229(A)
申请公布日期
1992.10.22
申请号
JP19910065076
申请日期
1991.03.28
申请人
YOKOGAWA ELECTRIC CORP
发明人
FUKUHARA SATOSHI
分类号
G01L11/00
主分类号
G01L11/00
代理机构
代理人
主权项
地址
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