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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH04289650(A)
申请公布日期
1992.10.14
申请号
JP19910052783
申请日期
1991.03.18
申请人
FUJITSU LTD
发明人
KONO MASANOBU
分类号
C23C14/48;H01J37/04;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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