| 摘要 |
PURPOSE: To provide a flooding device for optimizing the flooding of a high speed vacuum pump. CONSTITUTION: This flooding device is provided with a control device 21 for controlling the flood valve 6 of a vacuum pump to operate the air supply valve according to the magnitude of force working to the rotor of the vacuum pump during the execution of air supply. If it uses active type magnetic bearings 10 and 12, the magnitude of the force can be determined by measuring the current in these magnetic bearings 10 and 12. If it uses hybrid type structure or mechanical bearings free from position fluctuation, the magnitude of the force can indirectly be determined by measuring the distance or spacing between a rotor member and a stator member or directly be determined by means of force sensors.
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