| 摘要 |
PURPOSE:To improve durability and to facilitate control, in a fine motion stage driving device for driving the fine motion stage used for a semiconductor manufacture device, etc. CONSTITUTION:This fine motion stage driving device 50 has a yoke and also cooling member 51 composed of a ferromagnetic body, provided with a cooling means of a Peltier element and fin, etc., two actuators 52, 53 generating the magnetic flux in the reverse direction to each other, provided in parallel to each other on the side face of the yoke and also cooling member 51, and the member 54 for attraction composed of a ferromagnetic body, provided in parallel to the yoke and cooling member 41 each other on the fine motion stage. Now, each actuator 52, 53 are the electro-magnets that lead wires are formed with their being wound in order on the heat pipe having a container consisting of a ferromagnetic body, laminated in N layers cylindrically. |
