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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH04206822(A)
申请公布日期
1992.07.28
申请号
JP19900337451
申请日期
1990.11.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
INABA YUTAKA
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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