APPARATUS FOR AND METHOD OF GENERATING A PLASMA,申请号GB19920010889-传众专利搜索

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发明名称	APPARATUS FOR AND METHOD OF GENERATING A PLASMA
摘要
申请公布号	GB9210889(D0)	申请公布日期	1992.07.08
申请号	GB19920010889	申请日期	1992.05.21
申请人	SUPERION LIMITED	发明人
分类号	H01J37/08;H05H1/48	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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