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发明名称
FORMATION METHOD OF THIN FILM BIMORPH TYPE PIEZOELECTRIC ELEMENT
摘要
申请公布号
JPH04188684(A)
申请公布日期
1992.07.07
申请号
JP19900311414
申请日期
1990.11.19
申请人
CANON INC
发明人
YAMAMOTO KEISUKE;YAGI TAKAYUKI;KASANUKI YUJI;SUZUKI YOSHIO
分类号
H01L41/09
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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