| 摘要 |
<p>PURPOSE:To obtain a stable non-linear element by forming a non-linear electric conduction reducing layer by an electrochemical technique after overlaying a lower electrode with an insulating layer used for element area restriction. CONSTITUTION:Metal chromium is deposited on a substrate 11 and etched into a predetermined shape to form a lower electrode 12, and photosensitive polyimide is applied on it, photopatterned, and coated leaving a part corresponding to an element to form an insulator layer 13 which restricts the element part. Next, a mixture of an acetonitrile-aniline solution and sodium perchlorate added with pyridine serving as the support electrolyte is used as the electrolyte to make electrolytic oxidation polymerization to prepare polyaniline, which is deposited to form a non-linear electric conduction inducing layer 14. Chromium is deposited as an upper electrode from above it and etched into a predetermined shape to form an upper electrode 15. This process provides a stable non-linear element.</p> |
