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发明名称
METHOD OF FORMING MULTILAYER INTERCONNECTION STRUCTURE
摘要
申请公布号
JPH0485949(A)
申请公布日期
1992.03.18
申请号
JP19900199290
申请日期
1990.07.30
申请人
HITACHI LTD
发明人
SASAKI KEIJI;MIYAMA MASANORI;MITANI TSUNEO;HOSOE HIDEYUKI
分类号
H01L21/3205;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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