发明名称 METHOD FOR FABRICATING MULTILAYER CIRCUITS
摘要 METHOD FOR FABRICATING MULTILAYER CIRCUITS The invention is directed to a method for fabricating multilayer circuits on rigid ceramic substrates using conventional dielectric green tape and thick film conductive pastes in which the number of firing steps is substantially reduced while maintaining excellent X-Y dimensional stability. The method comprises the steps of: (a) providing a dimensionally stable electrically insulative substrate; (b) applying to the substrate a patterned conductive layer; (c) laminating to the patterned conductive layer and exposed areas of the substrate a layer of dielectric green tape having vias formed therein, the vias being in registration with the patterned conductive layer of step (b); (d) filling the vias in the laminated green tape with a conductive metallization; (e) in the event the multilayer circuit requires more than two layers having conductive patterns, repeating the sequence of steps (b) through (d) until the desired number of circuit layers has been obtained; (f) co-firing the multilayer assemblage from step (e); (g) applying a patterned conductive layer to the ceramic tape side of the co-fired assemblage from step (f) in registration with the vias in the ceramic tape; and (h) firing the patterned conductive layer.
申请公布号 CA1297596(C) 申请公布日期 1992.03.17
申请号 CA19880577504 申请日期 1988.09.15
申请人 DU PONT (E.I.) DE NEMOURS AND COMPANY 发明人 RELLICK, JOSEPH R.
分类号 H01L21/48;H05K3/46 主分类号 H01L21/48
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