发明名称 |
Integrated optical waveguide utilizing zinc oxide diffused into congruent and magnesium oxide doped lithium niobate crystals |
摘要 |
An integrated optical waveguide is constructed from a lithium niobate (LiNbO3) crystal substrate. In preferred embodiments, a diffused layer is formed proximate to one surface of the substrate by sputtering a thin layer of a zinc-related oxide (e.g., ZnO, ZnLiNbO4, or the like) onto the surface and then annealing the substrate. The resulting concentration of zinc in the diffused layer forms a waveguide having desirable optical propagation characteristics. The substrate is preferably congruent lithium niobate. In particularly preferred embodiments, the substrate is magnesium oxide (MgO) doped lithium niobate.
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申请公布号 |
US5095518(A) |
申请公布日期 |
1992.03.10 |
申请号 |
US19900566153 |
申请日期 |
1990.08.10 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
YOUNG, WHU-MING;FEJER, MARTIN M.;FEIGELSON, ROBERT S.;DIGONNET, MICHEL J. F. |
分类号 |
G02B6/134 |
主分类号 |
G02B6/134 |
代理机构 |
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主权项 |
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地址 |
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