SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF,申请号JP19900164850-传众专利搜索

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发明名称	SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号	JPH0461153(A)	申请公布日期	1992.02.27
申请号	JP19900164850	申请日期	1990.06.22
申请人	RICOH CO LTD	发明人	YAITA OSAMU
分类号	H01L29/73;H01L21/20;H01L21/263;H01L21/331;H01L21/76;H01L21/762;H01L21/8249;H01L27/06;H01L29/732	主分类号	H01L29/73
代理机构		代理人
主权项
地址

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