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发明名称
SEMICONDUCTOR DEVICE PRODUCTION METHOD
摘要
申请公布号
JPH0456339(A)
申请公布日期
1992.02.24
申请号
JP19900165758
申请日期
1990.06.26
申请人
OKI ELECTRIC IND CO LTD
发明人
TAKECHI EIJI
分类号
H01L21/762;H01L21/76;H01L27/08
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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