发明名称 |
Protective coating useful as a passivation layer for semiconductor devices |
摘要 |
A protective coating useful as a passivation layer for semiconductor devices incorporates a thin film of an amorphous diamond-like carbon. In one implementation, a thin film of amorphous silicon is deposited over the carbon material. The semiconductive passivation coating prevents electrical shorts, dissipates charge build-up and protects against chemical contamination. |
申请公布号 |
US5087959(A) |
申请公布日期 |
1992.02.11 |
申请号 |
US19880162912 |
申请日期 |
1988.03.02 |
申请人 |
MICROWAVE TECHNOLOGY, INC. |
发明人 |
OMORI, MASAHIRO;STONEHAM, EDWARD B. |
分类号 |
H01L23/29;H01L23/31 |
主分类号 |
H01L23/29 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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