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发明名称
CLEAN ROOM
摘要
申请公布号
JPH0439552(A)
申请公布日期
1992.02.10
申请号
JP19900144987
申请日期
1990.06.01
申请人
FUJITSU LTD
发明人
HIRANO HIROAKI;OHORI KAZUO
分类号
F24F7/06
主分类号
F24F7/06
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代理人
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