Chemical vapor deposition method of high quality diamond.
摘要
<p>Diamond having a large coefficient of thermal conductivity is prepared by a CVD method in which a reaction gas is decomposed and reacted under such condition that a concentration of carbon atoms in relation to hydrogen gas (A %), a concentration of nitrogen gas in relation to the whole reaction gas (B ppm) and a concentration of oxygen atoms in relation to the hydrogen gas (C %) satisfy the equation: <MATH> provided that alpha is not larger than 13, or B is not larger than 20.</p>
