| 摘要 |
A semiconductor sensor comprising a semiconductor sensor member provided on a support member. The sensor member has a base portion and a rim portion connected to each other by a beam portion. The base portion is fixed to the support member and the rim portion is held by the beam portion such that the rim portion is spaced apart from the base portion and the support portion. The beam portion is provided with a resistor to detect the changes of resistance values of the resistor due to mechanical stress caused at the beam portion.
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