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发明名称
STAGE UNIT
摘要
申请公布号
JPH0412657(A)
申请公布日期
1992.01.17
申请号
JP19900114612
申请日期
1990.04.27
申请人
SUMITOMO HEAVY IND LTD
发明人
TOMITA YOSHIYUKI;SATO FUMIAKI;ITO KAZUHIRO
分类号
F16C32/04;H01L21/00;H02K41/03
主分类号
F16C32/04
代理机构
代理人
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