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发明名称
PLASMA PARAMETER MEASURING METHOD
摘要
申请公布号
JPH042100(A)
申请公布日期
1992.01.07
申请号
JP19900102293
申请日期
1990.04.18
申请人
DAIHEN CORP
发明人
SAWAMURA SATOSHI
分类号
G01R19/08;H05H1/00;(IPC1-7):H05H1/00
主分类号
G01R19/08
代理机构
代理人
主权项
地址
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