| 摘要 |
PURPOSE:To execute minute piercing and groove working with high efficiency by irradiating a ceramics base material with an energy beam, forming a molten heat affected zone having many minute cracks and allowing an etching liquid to penetrate and eliminating the molten heat affected zone by etching. CONSTITUTION:By irradiating alumina ceramics 21 being chemically stable and having high corrosion resistance with an energy beam 12, an irradiated part is heated and melted, and by forming a molten heat affected zone 22 in which a composition variation and cracks are generated, and also, a molten heat affected zone 22a of a stepped groove by adjusting an irradiating condition and a scanning condition of a laser, the corrosion resistance is lowered, and also, the penetrability of an etching liquid is enhanced. Thereafter, by etching these molten heat affected zones 22, 22a and eliminating the molten heat affected zones 22, 22a, minute piercing, groove working, etc., are executed. |
