| 摘要 |
PURPOSE:To produce the stamper having a desired shape by controlling the power and time of ashing while monitoring the rugged shapes of the metallic stamper recorded with rugged patterns in an ashing stage for the above- mentioned metallic stamper. CONSTITUTION:The ashing device for a photoresist is provided with window glass to allow the transmission of a laser beam 3 (He-Ne laser) to the upper part of the stamper 1 in a chamber 2. The laser beam 3 is made incident through this window glass on the stamper 1 by slightly inclining the beam from the perpendicular. The reflected light 6 (0 order light) returned from the stamper 1 surface and the 1st order light 7 and second order light 8 emitted by being diffracted are received by respective detectors 4 and the intensities thereof are compared by a laser beam intensity monitor 5, by which the shapes of pits and grooves are monitored and the power and time of the ashing are controlled. The stamper of the desired shape is obtd. in this way and the quality of the duplicated substrate is stabilized. |
