| 摘要 |
PURPOSE: To shorten the time for milling by depositing a second magnetic layer and sacrificial mask layers in holes, removing the layer having the holes to expose part of a gap material layer and a first magnetic layer and placing a thin-film magnetic converter in a material removing stage. CONSTITUTION: A first lower layer pole tip 26 is deposited by evaporation and, thereafter, the gap material 34 is deposited by evaporation on this lower layer pole tip 26. Two photoresist dams 36 are deposited by evaporation on the gap material 34. The sacrificial masks 18, 20 are deposited by evaporation on the upper layer between the photoresist dams 36 and the photoresist dams 36 are etched apart from the poles. The sacrificial masks 18, 20 are formed between the two same photoresist dams 36 forming the upper pole piece 14 and are, therefore, aligned to the upper pole piece 14. At the time the structural body is subjected to milling, the exposed gap material 34 and the lower pole piece are removed while the upper pole piece 14 is protected by the masks. As a result, the time for the milling is shortened and the sacrificial masks are made thinner. |
