| 摘要 |
An infrared detector array or other electrical transducer device comprising an electrically-active film (10) of polymer material is manufactured with a pattern of electrodes (11) embedded at one face of the film (10). The electrodes (11) are formed on a support (4,5) as a photolithographically defined pattern of deposited material. These electrodes (11) are then transferred to the film (10) by depositing the film material on the support (4,5) and over the electrodes (11) and removing the support (4,5) at least at the area of the electrodes (11). The polymer material of the film (10) bonds well to the electrodes (11). In this manner, fine-geometry patterns of thin electrodes (11) can be formed embedded in the face of the film (10) and having reproduceable electrode characteristics for charge detection at the film faces in piezoelectric, pyroelectric and ferroelectric devices. The bulk (5) of the support may be of glass dissolvable in HF, and it may have a conductive surface layer (4) which protects the film against the and connects the electrodes (11) together when applying an electric field across the film (10) to pole the polymer material, e.g. for a pyroelectric infrared detector. |
