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发明名称
EVAPORATING DEVICE FOR METAL
摘要
申请公布号
JPH03226559(A)
申请公布日期
1991.10.07
申请号
JP19900018839
申请日期
1990.01.31
申请人
TOSHIBA CORP
发明人
KUWAKO AKIRA
分类号
B01D59/04;C23C14/24;C23C14/54
主分类号
B01D59/04
代理机构
代理人
主权项
地址
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