| 摘要 |
PURPOSE:To obtain a aluminum nitride base plate having large heat conductivity by an efficient method free from a degreasing stage by mixing the organic solvent soln. of a specified sintering adjuvant with aluminum nitride powder and vaporizing the organic solvent of this mixture, pressing and molding the mixture and aging the molded body and thereafter slicing it into a thin plate and sintering the thin plate. CONSTITUTION:The organic solvent soln. of the halide of alkali earth and rare earth is mixed with aluminum nitride powder. Then the organic solvent of this mixture is vaporized and the obtained powder is pressed at the pressure of >=1t/cm<2> pressing pressure and molded. Then this molded body is aged at room temp. to 500 deg.C for 3-30 days. The molded body finished in aging is sliced into a thin plate. The aimed base plate is obtained by sintering the thin plate at 1600-2000 deg.C in the gaseous nitrogen atmosphere. As shown in the above- mentioned method, the halide of alkaline earth or rare earth is dissolved in the organic solvent and added in order to enhance mixing of aluminum nitride and a sintering adjuvant. |
