发明名称 MOUNTING METHOD OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To realize precise alignment and mounting by electrically connecting bump electrodes, and relatively moving a semiconductor element and a board while monitoring electric continuity between corresponding electrode terminals on the mounting board surface. CONSTITUTION:At least a pair of bump electrodes 2 of a semiconductor element 1 is electrically connected by using a metal wire 3. It is monitor with an ammeter 7 checking whether electric continuity between at least a pair of electrode terminals 5 on a mounting board 4 is obtained. The element 1 and the board 4 are relatively moved while the monitoring is continued. Even if deformation like cutout exists, the bump electrodes of the semiconductor element are precisely aligned for the electrode terminals of the mounting board and mounting is enabled by the electric continuity detection based on the above monitoring.
申请公布号 JPH03218041(A) 申请公布日期 1991.09.25
申请号 JP19900013419 申请日期 1990.01.23
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NISHIGUCHI KATSUNORI;MIKI ATSUSHI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址