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发明名称
VERFAHREN ZUR ERMITTLUNG DER EBENHEIT VON HALBLEITERSCHEIBEN
摘要
申请公布号
DD293885(A5)
申请公布日期
1991.09.12
申请号
DD19900340072
申请日期
1990.04.25
申请人
VEB SPURENMETALLE FREIBERG,DE
发明人
HOFFMANN,ERIKA,DE;LANGE,WOLFRAM,DE;SCHMUGGE,KLAUS,DE;WEBER,KLAUS,DE;GEIL,WERNER,DE;STIEHLER,FRITZ,DE
分类号
G01B7/34;H01L21/30;(IPC1-7):G01B7/34
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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