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发明名称
DOPING METHOD IN PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH03183687(A)
申请公布日期
1991.08.09
申请号
JP19890321380
申请日期
1989.12.13
申请人
NIPPON STEEL CORP
发明人
TSUBAKIHARA OSAMU;KATAYAMA YOSHIKI
分类号
C30B15/04;H01L21/208
主分类号
C30B15/04
代理机构
代理人
主权项
地址
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