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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH03166361(A)
申请公布日期
1991.07.18
申请号
JP19890303320
申请日期
1989.11.24
申请人
NIPPON MINING CO LTD
发明人
SAWADA SUSUMU;WADA HIRONORI;ANAMI JUNICHI
分类号
C23C14/22;C23C14/00;C23C16/44
主分类号
C23C14/22
代理机构
代理人
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地址
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