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发明名称
VACUUM PROCESS DEVICE
摘要
申请公布号
JPH03162583(A)
申请公布日期
1991.07.12
申请号
JP19890302396
申请日期
1989.11.20
申请人
KINOSHITA HARUHISA;KOKUSAI ELECTRIC CO LTD
发明人
KINOSHITA HARUHISA;MATSUMOTO OSAMU;HORIE AKINOBU;SAKUMA HARUNOBU
分类号
C23C14/34;C23C16/50;C23F4/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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