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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPH03146670(A)
申请公布日期
1991.06.21
申请号
JP19890279976
申请日期
1989.10.30
申请人
TOSHIBA CORP
发明人
MIYAZAKI SHINJI
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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