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发明名称
FORMATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03116835(A)
申请公布日期
1991.05.17
申请号
JP19890251896
申请日期
1989.09.29
申请人
HITACHI LTD
发明人
KATO HISAYUKI;SAKAI HIDEO
分类号
H01L21/768;H01L21/31;H01L23/522
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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