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发明名称
POLYSILOXANSCHUTZLACK FUER IONEN- UND ELEKTRONENSTRAHL-LITHOGRAPHIE.
摘要
申请公布号
DE3678652(D1)
申请公布日期
1991.05.16
申请号
DE19863678652
申请日期
1986.02.28
申请人
HUGHES AIRCRAFT CO., LOS ANGELES, CALIF., US
发明人
BRAULT, G., ROBERT, SANTA MONICA, CA 90403, US
分类号
G03F7/075;G03F7/09;(IPC1-7):G03F7/075
主分类号
G03F7/075
代理机构
代理人
主权项
地址
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