发明名称 THIN-FILM TRANSISTOR AND DRIVING CIRCUIT BUILT-IN TYPE LIQUID CRYSTAL DISPLAY DEVICE
摘要 <p>PURPOSE:To shorten the operating time of respective elements and to simplify circuits by forming the channel parts formed on different substrates of single crystals. CONSTITUTION:After the thin film parts of the Si single crystals formed on the transparent substrate 1 are formed as the channel parts 2, semiconductor thin films 3 added with an (n) type impurity are selectively formed and a gate insulating film 4 is formed; thereafter, contact holes are opened and source and drain electrodes 5 and gate electrodes 6 are formed to constitute this liquid crystal display device. The channel parts 2 of the thin-film transistors are made of the single crystals in such a manner, by which the influence of the crystal grain boundaries specific to a polycrystal structure is averted and the mobility is greatly improved. The operating time of the respective elements is shortened in this way and the circuits are simplified.</p>
申请公布号 JPH0365928(A) 申请公布日期 1991.03.20
申请号 JP19890203371 申请日期 1989.08.05
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KOSEKI HIDEO;KAWAMURA TOSHIO;TSUKIKAWA YASUHIKO
分类号 G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/1343
代理机构 代理人
主权项
地址