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发明名称
MICROWAVE PLASMA PROCESSOR
摘要
申请公布号
JPH0362517(A)
申请公布日期
1991.03.18
申请号
JP19890074316
申请日期
1989.03.27
申请人
ANELVA CORP;NEC CORP
发明人
SAGAWA SEIJI;SASAKI MASAMI;MORI SUMIO
分类号
H01L21/302;H01J37/32;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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