SEMICONDUCTOR DEVICE LOW IN PARASITIC CAPACITANCE IN WIRING AND ITS MANUFACTURE,申请号JP19890156101-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE LOW IN PARASITIC CAPACITANCE IN WIRING AND ITS MANUFACTURE
摘要
申请公布号	JPH0321026(A)	申请公布日期	1991.01.29
申请号	JP19890156101	申请日期	1989.06.19
申请人	FUJITSU LTD	发明人	SUGAYA SHINJI
分类号	H01L23/52;H01L21/3205;H01L21/768;H01L23/522	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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