| 摘要 |
<p>PURPOSE:To effectively utilize electrons emitted from electron emitters as well as obtain an electron emitting element capable of restraining scattering of a beam by providing a high resistant thin film above and around a low potential side electrode for supplying a current to the high resistant thin film, and arranging a high potential side electrode above and around the high resistant thin film. CONSTITUTION:An inside electrode is a low potential side electrode 6 while an electrode above and around the electrode 6 is a high potential side electrode 4. Electron emitters 5a-1, 5a-2 formed of high resistant thin films are provided on both sides of an insulating layer sandwiched between both electrodes 4, 6. In an operation of an electron emitting element with this constitution, an electron e on an original orbit G emitted from the electron emitter 5a-1 is controlled with application of a force F1 to be scattered on an orbit H while an electron e on an original orbit I emitted from the electron emitter 5a-2 is controlled with application of a force F2 to be scattered on an orbit J so that a beam spot on a target electrode 14 can be restrained to be small. Therefore, the emitted electrons can be utilized effectively, and moreover, the electron emitting element capable of restraining the scattering of the beam can be obtained.</p> |
