| 摘要 |
PURPOSE:To obtain a small, light weight actuator by adhering a piezoelectric element and a stator through adhesive having high thermal conductivity and making a rotor and an output shaft coupled directly with the rotor of such material as having high thermal conductivity. CONSTITUTION:A piezoelectric element 1 and a resilient body 2 in a stator employ adhesive having high thermal conductivity in order to transmit beat, produced in the piezoelectric element 1, quickly to the resilient body 2. A rotor 3, an output shaft 10, a member 12 coupling the output shaft 10 and the rotor, a case 11 and a base 13 are made of such material as having high thermal conductivity, and the heat produced in the piezoelectric element 1 is diffused through the base 13 mounting an ultrasonic motor or the shaft coupling of the output shaft 10 to a gripper mechanism. Furthermore, thrust bearing 22 and journal bearing sections 20, 21 for supporting the rotor 3 being subjected to micro vibration and contacting with the output shaft 10 employ Teflon lining which can be used in vacuum. |
