WAND OPTICS COLUMN AND ASSOCIATED ARRAY WAND AND CHARGED PARTICLE SOURCE,申请号EP19890304132-传众专利搜索

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发明名称	WAND OPTICS COLUMN AND ASSOCIATED ARRAY WAND AND CHARGED PARTICLE SOURCE
摘要
申请公布号	EP0339951(A3)	申请公布日期	1990.10.31
申请号	EP19890304132	申请日期	1989.04.26
申请人	MICROELECTRONICS CENTER OF NORTH CAROLINA	发明人	JONES, GARY WAYNE;SCHWARTZ JONES, SUSAN KATHLEEN
分类号	H01J27/02;H01J37/08;H01J37/30;H01J37/317;H01L21/027;H01L21/30;(IPC1-7):H01J37/30;H01J37/09	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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