LASER INTERFERENCE TYPE ENCODER,申请号JP19880000452-传众专利搜索

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发明名称	LASER INTERFERENCE TYPE ENCODER
摘要
申请公布号	JPH01176914(A)	申请公布日期	1989.07.13
申请号	JP19880000452	申请日期	1988.01.05
申请人	NIKON CORP	发明人	OKI YASUSHI;TANITSU OSAMU;KITAJIMA EIICHI
分类号	G01D5/38	主分类号	G01D5/38
代理机构		代理人
主权项
地址

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