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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02237025(A)
申请公布日期
1990.09.19
申请号
JP19890057034
申请日期
1989.03.09
申请人
MATSUSHITA ELECTRON CORP
发明人
KAMISAKA WATARU
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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