| 发明名称 |
ASHING APPARATUS |
| 摘要 |
|
| 申请公布号 |
JPH02220437(A) |
申请公布日期 |
1990.09.03 |
| 申请号 |
JP19890039317 |
申请日期 |
1989.02.21 |
| 申请人 |
FUJITSU LTD |
发明人 |
OJIRI HIDEHIRO |
| 分类号 |
H01L21/302;H01L21/3065 |
主分类号 |
H01L21/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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