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发明名称
HALOGEN GAS PLASMA RESISTING MEMBER, FABRICATING METHOD THEREOF, STACKED BODY AND CORROSION-RESISTING MEMBER
摘要
申请公布号
KR20010098643(A)
申请公布日期
2001.11.08
申请号
KR1020010020358
申请日期
2001.04.17
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
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