ACCELEROMETER WITH COPLANAR PUSH-PULL FORCE TRANSDUCERS

摘要

ACCELEROMETER WITH COPLANAR PUSH-PULL FORCE TRANSDUCERS A push-pull accelerometer in which both force transducers (30, 32) lie in a common plane. Thus, when implemented in a silicon micromachined device, both transducers can be fabricated from a single crystal layer (34), thereby producing transducers with closely matched common mode responses.