| 摘要 |
PURPOSE:To reduce an average grain size and to obtain a smooth film structure by using NiCr:N (nitrogen-added nichrome alloy) for a light shielding layer. CONSTITUTION:Three layers; a layer in which nickel is added to chromium, a layer in which nitrogen is added to a nickel-chromium alloy and a layer in which oxygen and nitrogen are added to chromium, are successively formed on a transparent substrate. Namely, the particles grow larger than Cr, Cr:N:C, etc., if only the NiCr is used but the particle size is drastically reduced if N is added to the NiCr alloy. For example, the average grain size decreases from 70Angstrom to about 15Angstrom and the film having no cracking structure is obtd. if about 10% N is added to 80 to 20% NiCr. The finer average grain sizes are obtd. in this way and the smooth film structure is obtd. |
