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发明名称
SUBSTRATE HOUSING
摘要
申请公布号
JPH02209746(A)
申请公布日期
1990.08.21
申请号
JP19890030458
申请日期
1989.02.09
申请人
SEIKO EPSON CORP
发明人
SATO MASASHI
分类号
H01L21/673;H01L21/68
主分类号
H01L21/673
代理机构
代理人
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地址
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