发明名称 |
Preionization means for a gas-discharge laser |
摘要 |
A preionization means for a gas-discharge laser, such as an excimer laser, comprises a stirrup member 26 and a preionization strip 20 secured thereto. To obtain the longest possible life of the laser with economical material use the preionization strip 20 is made from a different material from the stirrup member 26.
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申请公布号 |
US4951295(A) |
申请公布日期 |
1990.08.21 |
申请号 |
US19890354142 |
申请日期 |
1989.05.19 |
申请人 |
LAMBDA-PHYSIK FORSCHUNGS-UND ENTWICKLUNGS GMBH |
发明人 |
STEINFUEHRER, GERD |
分类号 |
H01S3/038;H01S3/0971;H01S3/0977 |
主分类号 |
H01S3/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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