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发明名称
净化基材载件之方法与设备
摘要
于本发明第一实施态样中,系提供一基材载件,其包含一外壳,其可密封且可遮罩至少一基材。该基材载件包括一通至该外壳的第一埠口,且其适于在基材载件关闭时使气体流入该外壳。本发明亦提供其他多种实施态样。
申请公布号
TW200737391
申请公布日期
2007.10.01
申请号
TW096101142
申请日期
2007.01.11
申请人
应用材料股份有限公司
发明人
沙许文尼K. SHAH, VINAY K.;英格哈德特艾力克;哈德俊杰佛利C HUDGENS, JEFFREY C.;伊里亚德马丁
分类号
H01L21/673(2006.01)
主分类号
H01L21/673(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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