DRY THIN FILM PROCESSING EQUIPMENT,申请号JP19890028104-传众专利搜索

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发明名称	DRY THIN FILM PROCESSING EQUIPMENT
摘要
申请公布号	JPH02207529(A)	申请公布日期	1990.08.17
申请号	JP19890028104	申请日期	1989.02.07
申请人	FUJI ELECTRIC CO LTD	发明人	NAGAO YASUAKI
分类号	H01L21/302;H01L21/205;H01L21/3065;H01L21/31	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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